SP400

Workshop on mass flow measurement and control for the semiconductor industry 
2001
Robert F Berg, David S Green, George E Mattingly
NIST SP 400-101
10.6028/NIST.SP.400-101
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Thin film reference materials development 
1998
Barbara J Belzer, David L Blackburn
NIST SP 400-100
10.6028/NIST.SP.400-100
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Semiconductor measurement technology : the results of an interlaboratory study of ellipsometric measurements of thin film silicon dioxide on silicon
1997
Barbara J Belzer, David L Blackburn
NIST SP 400-99
10.6028/NIST.SP.400-99
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HOTPAC 
1995
John Albers
NIST SP 400-96
10.6028/NIST.SP.400-96
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Test structure implementation document 
1995
C E Schuster
NIST SP 400-97
10.6028/NIST.SP.400-97
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Survey of optical characterization methods for materials, processing, and manufacturing in the semiconductor industry 
1995
W Murray Bullis, S Perkowitz, D G Seiler
NIST SP 400-98
10.6028/NIST.SP.400-98
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Design and testing guides for the CMOS and lateral bipolar-on-SOI test library 
1994
Janet C Marshall, Mona E Zaghloul
NIST SP 400-93
10.6028/NIST.SP.400-93
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Improved characterization and evaluation measurements for HgCdTe detector materials, processes, and devices used on the GOES and TIROS satelites 
1994
D G Seiler, J R Lowney, W R Thurber, J J Kopanski, G G Harman
NIST SP 400-94
10.6028/NIST.SP.400-94
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User's manual for the program MONSEL-1 
1994
Jeremiah R Lowney, Egon Marx
NIST SP 400-95
10.6028/NIST.SP.400-95
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A collection of computer programs for two-probe resistance (spreading resistance) and four-probe resistance calculations, RESPAC 
1993
John Albers, Harry L Berkowitz
NIST SP 400-91
10.6028/NIST.SP.400-91
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Evolution of silicon materials characterization 
1993
W Murray Bullis
NIST SP 400-92
10.6028/NIST.SP.400-92
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INSTANT - IGBT network simulation and transient Analysis tool 
1992
A R Hefner
NIST SP 400-88
10.6028/NIST.SP.400-88
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Version 2.0 of the TXYZ thermal analysis program 
1992
John Albers
NIST SP 400-89
10.6028/NIST.SP.400-89
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Evaluating a chip, wafer, or lot using SUXES, SPICE, and STAT2 
1992
J C Marshall, R L Mattis
NIST SP 400-90
10.6028/NIST.SP.400-90
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A software program for aiding the analysis of ellipsometric measurements, simple spectroscopic models 
1990
J F Marchiando
NIST SP 400-84
10.6028/NIST.SP.400-84
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EPROP : an interactive FORTRAN program for computing selected electronic properties of gallium arsenide and silicon
1990
Alan C Seabaugh, John J Mathias, Michael I Bell
NIST SP 400-85
10.6028/NIST.SP.400-85
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Thermal resistance measurements 
1990
Frank F Oettinger, David L Blackburn
NIST SP 400-86
10.6028/NIST.SP.400-86
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A programmable reverse-bias safe operating area transistor testor 
1990
D W Berning
NIST SP 400-87
10.6028/NIST.SP.400-87
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Database for and statistical analysisof the interlaboratory determination of the conversion coefficient for the measurement of the interstitial oxygen content of silicon by infrared absorption 
1989
Aslan Baghdadi, Robert I Scace, E Jane Walters
NIST SP 400-82
10.6028/NIST.SP.400-82
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A software program for aiding the analysis of ellipsometric measurements, simple methods 
1989
J F Marchiando
NIST SP 400-83
10.6028/NIST.SP.400-83
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Automatic determination of the interstitial oxygen content of silicon wafers polished on both sides 
1988
Warren K Gladden, Stephen R Slaughter, Walter M Duncan, Aslan Baghdadi
NIST SP 400-81
10.6028/NIST.SP.400-81
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Results of the Monte Carlo calculation of one- and two-dimensional distributions of particles and damage 
1987
John Albers
NBS SP 400-79
10.6028/NBS.SP.400-79
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Silicon-on-insulator 
1987
A Baghdadi, E J Walters
NBS SP 400-80
10.6028/NBS.SP.400-80
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Analytic analysis of ellipsometric errors 
1986
Deane Chandler-Horowitz
NBS SP 400-78
10.6028/NBS.SP.400-78
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MOS1 a program for two-dimensional analysis of Si MOSFETs 
1985
Charles L Wilson, James L Blue
NBS SP 400-77
10.6028/NBS.SP.400-77
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TXYZ a program for semiconductor IC thermal analysis 
1984
John Albers
NBS SP 400-76
10.6028/NBS.SP.400-76
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A FORTRAN program for analysis of data from microelectronic test structures 
1983
Richard L Mattis, Martin G Buehler
NBS SP 400-75
10.6028/NBS.SP.400-75
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The use of acoustic emission to determine the integrity of large kovar glass-sealed microelectronic packages 
1982
George G Harman
NBS SP 400-70
10.6028/NBS.SP.400-70
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Differential capacitance-voltage profiling of Schottky barrier diodes for measuring implanted depth distributions in silicon 
1982
R G Wilson, D M Jamba
NBS SP 400-71
10.6028/NBS.SP.400-71
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NBSRADC workshop moisture measurement technology for hermetic semiconductor devices II 
1982
Elaine C Cohen, Stanley Ruthberg
NBS SP 400-72
10.6028/NBS.SP.400-72
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Graphical solution for the helium leak detector and radioisotope methods of hermetic test 
1982
Stanley Ruthberg
NBS SP 400-73
10.6028/NBS.SP.400-73
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Interlaboratory study on linewidth measurements for antireflective chromium photomasks 
1982
John M Jerke, M Carroll Croarkin, Ruth N Varner
NBS SP 400-74
10.6028/NBS.SP.400-74
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The relationship between resistivity and dopant density for phosphorus-and boron-doped silicon 
1981
W R Thurber, R L Mattis, Liu Y and, J J Filliben
NBS SP 400-64
10.6028/NBS.SP.400-64
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Test patterns NBS-28 and NBS-28A 
1981
Michael A Mitchell, Loren W Linholm
NBS SP 400-65
10.6028/NBS.SP.400-65
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The design, testing, and analysis of a comprehensive test pattern for measuring CMOSSOS process performance and control 
1981
Loren W Linholm
NBS SP 400-66
10.6028/NBS.SP.400-66
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The capabilities and limitations of auger sputer profiling for studies of semiconductors 
1981
S A Schwarz, C R Helms, W E Spicer, N J Taylor
NBS SP 400-67
10.6028/NBS.SP.400-67
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A manual wafer probe station for an integrated circuit test system 
1981
G P Carver, W A Cullins
NBS SP 400-68
10.6028/NBS.SP.400-68
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ARPANBS Workshop V 
1981
Harry A Schafft, Stanley Ruthberg, Elaine C Cohen
NBS SP 400-69
10.6028/NBS.SP.400-69
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Modulation measurements for microwave mixers 
1980
James M Kenney
NBS SP 400-16
10.6028/NBS.SP.400-16
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Accurate linewidth measurements on integrated-circuit photomasks 
1980
John M Jerke
NBS SP 400-43
10.6028/NBS.SP.400-43
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Semiconductor measurement technology 
1980
W Murray Bullis
NBS SP 400-45
10.6028/NBS.SP.400-45
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Comprehensive test pattern and approach for characterizing SOS technology 
1980
W E Ham
NBS SP 400-56
10.6028/NBS.SP.400-56
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Technical impediments to a more effective utilization of neutron transmutation doped silicon for high-power device fabrication 
1980
D R Myers
NBS SP 400-60
10.6028/NBS.SP.400-60
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Metrology for submicrometer devices and circuits 
1980
W Murray Bullis
NBS SP 400-61
10.6028/NBS.SP.400-61
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Method to determine the quality of sapphire 
1980
M T Duffy, P J Zanzucchi, W E Ham, J F Corboy, GW Cullen
NBS SP 400-62
10.6028/NBS.SP.400-62
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A FORTRAN program for calculating the electrical parameters of extrinsic silicon 
1980
R D Larrabee, W R Thurber, W Murray Bullis
NBS SP 400-63
10.6028/NBS.SP.400-63
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Thermal resistance measurements on power transistors 
1979
Sherwin Rubin, Frank F Oettinger
NBS SP 400-14
10.6028/NBS.SP.400-14
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Semiconductor measurement technology 
1979
W Murray Bullis
NBS SP 400-38
10.6028/NBS.SP.400-38
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The theoretical and experimental study of the temperature and dopant density dependence of hole mobility, effective mass, and resistivity in boron-doped silicon 
1979
Sheng S Li
NBS SP 400-47
10.6028/NBS.SP.400-47
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Spreading resistance analysis for silicon layers with nonuniform resistivity 
1979
David H Dickey, James R Ehrstein
NBS SP 400-48
10.6028/NBS.SP.400-48
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Reliability technology for cardiac pacemakers III 
1979
Harry A Schafft
NBS SP 400-50
10.6028/NBS.SP.400-50
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A production-compatible microelectronic test pattern for evaluating photomask misalignment 
1979
T J Russell, D A Maxwell
NBS SP 400-51
10.6028/NBS.SP.400-51
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An automated photovoltaic system for the measurement of resistivity variations in high-resistivity circular silicon slices 
1979
David L Blackburn
NBS SP 400-52
10.6028/NBS.SP.400-52
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A reverse-bias safe operating area transistor tester 
1979
David W Berning
NBS SP 400-54
10.6028/NBS.SP.400-54
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A wafer chuck for use between -196 and 350 degrees C 
1979
R Y Koyama, M G Buehler
NBS SP 400-55
10.6028/NBS.SP.400-55
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DISTRIB I 
1979
David Gilsinn, Richard Kraft
NBS SP 400-57
10.6028/NBS.SP.400-57
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NBSDOE Workshop, stability of (thin film) solar cells and materials 
1979
David E Sawyer, Harry A Schafft
NBS SP 400-58
10.6028/NBS.SP.400-58
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Nondestructive tests used to insure the integrity of semiconductor devices, with emphasis on acousticemission techniques 
1979
George G Harman
NBS SP 400-59
10.6028/NBS.SP.400-59
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Automated scanning low-energy electron probe (ASLEEP) for semiconductor wafer diagnostics 
1978
A Christou
NBS SP 400-30
10.6028/NBS.SP.400-30
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Microelectronic test pattern NBS-4 
1978
W Robert Thurber, Martin G Buehler
NBS SP 400-32
10.6028/NBS.SP.400-32
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Semiconductor measurement technology 
1978
W Murray Bullis, J Franklin Mayo-Wells
NBS SP 400-36
10.6028/NBS.SP.400-36
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Automated photomask inspection 
1978
Donald B Novotny, Dino R Ciarlo
NBS SP 400-46
10.6028/NBS.SP.400-46
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Angular sensitivity of controlled implanteddoping profiles 
1978
Robert G Wilson, Howard L Dunlap, Douglas M Jamba, David R Myers
NBS SP 400-49
10.6028/NBS.SP.400-49
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Microelectronic Processing Laboratory at NBS 
1978
T F Leedy, Y M Liu
NBS SP 400-53
10.6028/NBS.SP.400-53
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A laser scanner for semiconductor devices 
1977
David E Sawyer, David W Berning
NBS SP 400-24
10.6028/NBS.SP.400-24
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Semiconductor measurement technology 
1977
W Murray Bullis
NBS SP 400-29
10.6028/NBS.SP.400-29
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Techniques for measuring the integrity of passivation overcoats on integrated circuits 
1977
Werner Kern, Robert B Comizzoli
NBS SP 400-31
10.6028/NBS.SP.400-31
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The dopant density and temperature dependence of electron mobility and resistivity in N-type silicon 
1977
Sheng S Li
NBS SP 400-33
10.6028/NBS.SP.400-33
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Notes on SEM examination of microelectronic devices 
1977
John R Devaney
NBS SP 400-35
10.6028/NBS.SP.400-35
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Suppression of premature dielectric breakdown for high-voltage capacitance measurements 
1977
Alvin M Goodman
NBS SP 400-37
10.6028/NBS.SP.400-37
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Some aspects of dose measurement for accurate ion implantation 
1977
Douglas M Jamba
NBS SP 400-39
10.6028/NBS.SP.400-39
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A 25-kV bias-isolation unit for 1-MHz capacitance and conductance measurements 
1977
Alvin M Goodman
NBS SP 400-40
10.6028/NBS.SP.400-40
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A versatile high-voltage bias supply for extended range MIS C(V) and G(V) measurements 
1977
Paul Kuczer, Harvey O Hook, Alvin M Goodman
NBS SP 400-41
10.6028/NBS.SP.400-41
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Reliability technology for cardiac pacemakers II 
1977
Harry A Schafft
NBS SP 400-42
10.6028/NBS.SP.400-42
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Safe operating area limits for power transistors 
1977
David L Blackburn
NBS SP 400-44
10.6028/NBS.SP.400-44
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ARPANBS Workshop III 
1976
Harry A Schafft
NBS SP 400-15
10.6028/NBS.SP.400-15
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The destructive bond pull test 
1976
John Albers
NBS SP 400-18
10.6028/NBS.SP.400-18
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Semiconductor measurement technology 
1976
W Murray Bullis
NBS SP 400-19
10.6028/NBS.SP.400-19
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Planar test structures for characterizing impurities in silicon 
1976
M G Buchler, J M David, R L Mattis, W E Phillips, W R Thurber
NBS SP 400-21
10.6028/NBS.SP.400-21
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Microelectronic test pattern NBS-3 for evaluating the resistivity-dopant density relationship of silicon 
1976
Martin G Buehler
NBS SP 400-22
10.6028/NBS.SP.400-22
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ARPANBS Workshop IV 
1976
A George Lieberman
NBS SP 400-23
10.6028/NBS.SP.400-23
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Semiconductor measurement technology 
1976
W Murray Bullis
NBS SP 400-25
10.6028/NBS.SP.400-25
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Defects in PN junctions and MOS capacitors observed using thermally stimulated current and capacitance measurements-videotape script 
1976
Martin G Buehler
NBS SP 400-26
10.6028/NBS.SP.400-26
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Laser scanning of active semiconductor devices-videotape script 
1976
David E Sawyer, David W Berning
NBS SP 400-27
10.6028/NBS.SP.400-27
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NBSFDA workshop reliability technology for cardiac pacemakers 
1976
Harry A Schafft
NBS SP 400-28
10.6028/NBS.SP.400-28
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Safe operation of capacitance meters using high applied-bias voltage 
1976
Alvin M Goodman
NBS SP 400-34
10.6028/NBS.SP.400-34
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Permanent damage effects of nuclear radiation on the x-band performance of silicon Schottky-Barrier microwave mixer diodes 
1976
James M Kenney
NBS SP 400-7
10.6028/NBS.SP.400-7
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A BASIC program for calculating dopant density profiles from capaciyance-voltage 
1975
Richard L Mattis, Martin G Buehler
NBS SP 400-11
10.6028/NBS.SP.400-11
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Semiconductor measurement technology 
1975
W Murray Bullis
NBS SP 400-12
10.6028/NBS.SP.400-12
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Improved infrared response technique for detecting defects and impurities in germanium and silicon d-i-n diodes 
1975
A H Sher
NBS SP 400-13
10.6028/NBS.SP.400-13
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Semiconductor measurement technology 
1975
W Murray Bullis
NBS SP 400-17
10.6028/NBS.SP.400-17
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Optical and dimensional-measurement problems with photomasking in microelectronics 
1975
John M Jerke
NBS SP 400-20
10.6028/NBS.SP.400-20
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Measurement of transistor scattering parameters 
1975
George J Rogers, David E Sawyer
NBS SP 400-5
10.6028/NBS.SP.400-5
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Semiconductor measurement technology 
1975
W Murray Bullis
NBS SP 400-8
10.6028/NBS.SP.400-8
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Semiconductor measurement technology 
1974
W Murray Bullis
NBS SP 400-1
10.6028/NBS.SP.400-1
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Spreading resistance symposium 
1974
James R Ehrstein
NBS SP 400-10
10.6028/NBS.SP.400-10
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Microelectronic ultrasonic bonding 
1974
George G Harman
NBS SP 400-2
10.6028/NBS.SP.400-2
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ARPANBS Workshop I 
1974
Harry A Schafft
NBS SP 400-3
10.6028/NBS.SP.400-3
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Semiconductor measurement technology 
1974
W Murray Bullis
NBS SP 400-4
10.6028/NBS.SP.400-4
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Microelectronic test patterns 
1974
Martin G Buehler
NBS SP 400-6
10.6028/NBS.SP.400-6
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ARPANBS Workshop II 
1974
Harry A Schafft
NBS SP 400-9
10.6028/NBS.SP.400-9
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