List now available on the NIST Research Library's website
SP 400: Semiconductor Measurement Technology
List updated 2024-03-13-04:00
SP400
Semiconductor measurement technology
1974
NBS SP 400-1
10.6028/NBS.SP.400-1
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1974
NBS SP 400-1
10.6028/NBS.SP.400-1
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Spreading resistance symposium
1974
NBS SP 400-10
10.6028/NBS.SP.400-10
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1974
NBS SP 400-10
10.6028/NBS.SP.400-10
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A BASIC program for calculating dopant density profiles from capaciyance-voltage
1975
NBS SP 400-11
10.6028/NBS.SP.400-11
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1975
NBS SP 400-11
10.6028/NBS.SP.400-11
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Semiconductor measurement technology
1975
NBS SP 400-12
10.6028/NBS.SP.400-12
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1975
NBS SP 400-12
10.6028/NBS.SP.400-12
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Improved infrared response technique for detecting defects and impurities in germanium
and silicon d-i-n diodes
1975
NBS SP 400-13
10.6028/NBS.SP.400-13
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1975
NBS SP 400-13
10.6028/NBS.SP.400-13
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Thermal resistance measurements on power transistors
1979
NBS SP 400-14
10.6028/NBS.SP.400-14
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1979
NBS SP 400-14
10.6028/NBS.SP.400-14
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Modulation measurements for microwave mixers
1980
NBS SP 400-16
10.6028/NBS.SP.400-16
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1980
NBS SP 400-16
10.6028/NBS.SP.400-16
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Semiconductor measurement technology
1975
NBS SP 400-17
10.6028/NBS.SP.400-17
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1975
NBS SP 400-17
10.6028/NBS.SP.400-17
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The destructive bond pull test
1976
NBS SP 400-18
10.6028/NBS.SP.400-18
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1976
NBS SP 400-18
10.6028/NBS.SP.400-18
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Semiconductor measurement technology
1976
NBS SP 400-19
10.6028/NBS.SP.400-19
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1976
NBS SP 400-19
10.6028/NBS.SP.400-19
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Microelectronic ultrasonic bonding
1974
NBS SP 400-2
10.6028/NBS.SP.400-2
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1974
NBS SP 400-2
10.6028/NBS.SP.400-2
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Optical and dimensional-measurement problems with photomasking in microelectronics
1975
NBS SP 400-20
10.6028/NBS.SP.400-20
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1975
NBS SP 400-20
10.6028/NBS.SP.400-20
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Planar test structures for characterizing impurities in silicon
1976
NBS SP 400-21
10.6028/NBS.SP.400-21
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1976
NBS SP 400-21
10.6028/NBS.SP.400-21
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Microelectronic test pattern NBS-3 for evaluating the resistivity-dopant density relationship
of silicon
1976
NBS SP 400-22
10.6028/NBS.SP.400-22
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1976
NBS SP 400-22
10.6028/NBS.SP.400-22
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A laser scanner for semiconductor devices
1977
NBS SP 400-24
10.6028/NBS.SP.400-24
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1977
NBS SP 400-24
10.6028/NBS.SP.400-24
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Semiconductor measurement technology
1976
NBS SP 400-25
10.6028/NBS.SP.400-25
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1976
NBS SP 400-25
10.6028/NBS.SP.400-25
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Defects in PN junctions and MOS capacitors observed using thermally stimulated current
and capacitance measurements-videotape script
1976
NBS SP 400-26
10.6028/NBS.SP.400-26
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1976
NBS SP 400-26
10.6028/NBS.SP.400-26
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Laser scanning of active semiconductor devices-videotape script
1976
NBS SP 400-27
10.6028/NBS.SP.400-27
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1976
NBS SP 400-27
10.6028/NBS.SP.400-27
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NBSFDA workshop reliability technology for cardiac pacemakers
1976
NBS SP 400-28
10.6028/NBS.SP.400-28
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1976
NBS SP 400-28
10.6028/NBS.SP.400-28
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Semiconductor measurement technology
1977
NBS SP 400-29
10.6028/NBS.SP.400-29
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1977
NBS SP 400-29
10.6028/NBS.SP.400-29
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Automated scanning low-energy electron probe (ASLEEP) for semiconductor wafer diagnostics
1978
NBS SP 400-30
10.6028/NBS.SP.400-30
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1978
NBS SP 400-30
10.6028/NBS.SP.400-30
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Techniques for measuring the integrity of passivation overcoats on integrated circuits
1977
NBS SP 400-31
10.6028/NBS.SP.400-31
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1977
NBS SP 400-31
10.6028/NBS.SP.400-31
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Microelectronic test pattern NBS-4
1978
NBS SP 400-32
10.6028/NBS.SP.400-32
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1978
NBS SP 400-32
10.6028/NBS.SP.400-32
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The dopant density and temperature dependence of electron mobility and resistivity
in N-type silicon
1977
NBS SP 400-33
10.6028/NBS.SP.400-33
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1977
NBS SP 400-33
10.6028/NBS.SP.400-33
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Safe operation of capacitance meters using high applied-bias voltage
1976
NBS SP 400-34
10.6028/NBS.SP.400-34
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1976
NBS SP 400-34
10.6028/NBS.SP.400-34
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Notes on SEM examination of microelectronic devices
1977
NBS SP 400-35
10.6028/NBS.SP.400-35
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1977
NBS SP 400-35
10.6028/NBS.SP.400-35
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Semiconductor measurement technology
1978
NBS SP 400-36
10.6028/NBS.SP.400-36
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1978
NBS SP 400-36
10.6028/NBS.SP.400-36
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Suppression of premature dielectric breakdown for high-voltage capacitance measurements
1977
NBS SP 400-37
10.6028/NBS.SP.400-37
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1977
NBS SP 400-37
10.6028/NBS.SP.400-37
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Semiconductor measurement technology
1979
NBS SP 400-38
10.6028/NBS.SP.400-38
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1979
NBS SP 400-38
10.6028/NBS.SP.400-38
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Some aspects of dose measurement for accurate ion implantation
1977
NBS SP 400-39
10.6028/NBS.SP.400-39
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1977
NBS SP 400-39
10.6028/NBS.SP.400-39
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Semiconductor measurement technology
1974
NBS SP 400-4
10.6028/NBS.SP.400-4
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1974
NBS SP 400-4
10.6028/NBS.SP.400-4
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A 25-kV bias-isolation unit for 1-MHz capacitance and conductance measurements
1977
NBS SP 400-40
10.6028/NBS.SP.400-40
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1977
NBS SP 400-40
10.6028/NBS.SP.400-40
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A versatile high-voltage bias supply for extended range MIS C(V) and G(V) measurements
1977
NBS SP 400-41
10.6028/NBS.SP.400-41
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1977
NBS SP 400-41
10.6028/NBS.SP.400-41
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Reliability technology for cardiac pacemakers II
1977
NBS SP 400-42
10.6028/NBS.SP.400-42
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1977
NBS SP 400-42
10.6028/NBS.SP.400-42
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Accurate linewidth measurements on integrated-circuit photomasks
1980
NBS SP 400-43
10.6028/NBS.SP.400-43
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1980
NBS SP 400-43
10.6028/NBS.SP.400-43
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Safe operating area limits for power transistors
1977
NBS SP 400-44
10.6028/NBS.SP.400-44
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1977
NBS SP 400-44
10.6028/NBS.SP.400-44
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Semiconductor measurement technology
1980
NBS SP 400-45
10.6028/NBS.SP.400-45
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1980
NBS SP 400-45
10.6028/NBS.SP.400-45
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Automated photomask inspection
1978
NBS SP 400-46
10.6028/NBS.SP.400-46
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1978
NBS SP 400-46
10.6028/NBS.SP.400-46
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The theoretical and experimental study of the temperature and dopant density dependence
of hole mobility, effective mass, and resistivity in boron-doped silicon
1979
NBS SP 400-47
10.6028/NBS.SP.400-47
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1979
NBS SP 400-47
10.6028/NBS.SP.400-47
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Spreading resistance analysis for silicon layers with nonuniform resistivity
1979
NBS SP 400-48
10.6028/NBS.SP.400-48
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1979
NBS SP 400-48
10.6028/NBS.SP.400-48
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Angular sensitivity of controlled implanteddoping profiles
1978
NBS SP 400-49
10.6028/NBS.SP.400-49
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1978
NBS SP 400-49
10.6028/NBS.SP.400-49
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Measurement of transistor scattering parameters
1975
NBS SP 400-5
10.6028/NBS.SP.400-5
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1975
NBS SP 400-5
10.6028/NBS.SP.400-5
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Reliability technology for cardiac pacemakers III
1979
NBS SP 400-50
10.6028/NBS.SP.400-50
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1979
NBS SP 400-50
10.6028/NBS.SP.400-50
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A production-compatible microelectronic test pattern for evaluating photomask misalignment
1979
NBS SP 400-51
10.6028/NBS.SP.400-51
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1979
NBS SP 400-51
10.6028/NBS.SP.400-51
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An automated photovoltaic system for the measurement of resistivity variations in
high-resistivity circular silicon slices
1979
NBS SP 400-52
10.6028/NBS.SP.400-52
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1979
NBS SP 400-52
10.6028/NBS.SP.400-52
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Microelectronic Processing Laboratory at NBS
1978
NBS SP 400-53
10.6028/NBS.SP.400-53
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1978
NBS SP 400-53
10.6028/NBS.SP.400-53
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A reverse-bias safe operating area transistor tester
1979
NBS SP 400-54
10.6028/NBS.SP.400-54
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1979
NBS SP 400-54
10.6028/NBS.SP.400-54
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A wafer chuck for use between -196 and 350 degrees C
1979
NBS SP 400-55
10.6028/NBS.SP.400-55
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1979
NBS SP 400-55
10.6028/NBS.SP.400-55
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Comprehensive test pattern and approach for characterizing SOS technology
1980
NBS SP 400-56
10.6028/NBS.SP.400-56
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1980
NBS SP 400-56
10.6028/NBS.SP.400-56
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NBSDOE Workshop, stability of (thin film) solar cells and materials
1979
NBS SP 400-58
10.6028/NBS.SP.400-58
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1979
NBS SP 400-58
10.6028/NBS.SP.400-58
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Nondestructive tests used to insure the integrity of semiconductor devices, with emphasis
on acousticemission techniques
1979
NBS SP 400-59
10.6028/NBS.SP.400-59
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1979
NBS SP 400-59
10.6028/NBS.SP.400-59
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Technical impediments to a more effective utilization of neutron transmutation doped
silicon for high-power device fabrication
1980
NBS SP 400-60
10.6028/NBS.SP.400-60
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1980
NBS SP 400-60
10.6028/NBS.SP.400-60
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Metrology for submicrometer devices and circuits
1980
NBS SP 400-61
10.6028/NBS.SP.400-61
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1980
NBS SP 400-61
10.6028/NBS.SP.400-61
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Method to determine the quality of sapphire
1980
NBS SP 400-62
10.6028/NBS.SP.400-62
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1980
NBS SP 400-62
10.6028/NBS.SP.400-62
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A FORTRAN program for calculating the electrical parameters of extrinsic silicon
1980
NBS SP 400-63
10.6028/NBS.SP.400-63
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1980
NBS SP 400-63
10.6028/NBS.SP.400-63
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The relationship between resistivity and dopant density for phosphorus-and boron-doped
silicon
1981
NBS SP 400-64
10.6028/NBS.SP.400-64
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1981
NBS SP 400-64
10.6028/NBS.SP.400-64
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Test patterns NBS-28 and NBS-28A
1981
NBS SP 400-65
10.6028/NBS.SP.400-65
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1981
NBS SP 400-65
10.6028/NBS.SP.400-65
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The design, testing, and analysis of a comprehensive test pattern for measuring CMOSSOS
process performance and control
1981
NBS SP 400-66
10.6028/NBS.SP.400-66
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1981
NBS SP 400-66
10.6028/NBS.SP.400-66
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The capabilities and limitations of auger sputer profiling for studies of semiconductors
1981
NBS SP 400-67
10.6028/NBS.SP.400-67
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1981
NBS SP 400-67
10.6028/NBS.SP.400-67
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A manual wafer probe station for an integrated circuit test system
1981
NBS SP 400-68
10.6028/NBS.SP.400-68
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1981
NBS SP 400-68
10.6028/NBS.SP.400-68
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Permanent damage effects of nuclear radiation on the x-band performance of silicon
Schottky-Barrier microwave mixer diodes
1976
NBS SP 400-7
10.6028/NBS.SP.400-7
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1976
NBS SP 400-7
10.6028/NBS.SP.400-7
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The use of acoustic emission to determine the integrity of large kovar glass-sealed
microelectronic packages
1982
NBS SP 400-70
10.6028/NBS.SP.400-70
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1982
NBS SP 400-70
10.6028/NBS.SP.400-70
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Differential capacitance-voltage profiling of Schottky barrier diodes for measuring
implanted depth distributions in silicon
1982
NBS SP 400-71
10.6028/NBS.SP.400-71
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1982
NBS SP 400-71
10.6028/NBS.SP.400-71
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NBSRADC workshop moisture measurement technology for hermetic semiconductor devices
II
1982
NBS SP 400-72
10.6028/NBS.SP.400-72
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1982
NBS SP 400-72
10.6028/NBS.SP.400-72
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Graphical solution for the helium leak detector and radioisotope methods of hermetic
test
1982
NBS SP 400-73
10.6028/NBS.SP.400-73
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1982
NBS SP 400-73
10.6028/NBS.SP.400-73
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Interlaboratory study on linewidth measurements for antireflective chromium photomasks
1982
NBS SP 400-74
10.6028/NBS.SP.400-74
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1982
NBS SP 400-74
10.6028/NBS.SP.400-74
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A FORTRAN program for analysis of data from microelectronic test structures
1983
NBS SP 400-75
10.6028/NBS.SP.400-75
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1983
NBS SP 400-75
10.6028/NBS.SP.400-75
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TXYZ a program for semiconductor IC thermal analysis
1984
NBS SP 400-76
10.6028/NBS.SP.400-76
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1984
NBS SP 400-76
10.6028/NBS.SP.400-76
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MOS1 a program for two-dimensional analysis of Si MOSFETs
1985
NBS SP 400-77
10.6028/NBS.SP.400-77
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1985
NBS SP 400-77
10.6028/NBS.SP.400-77
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Analytic analysis of ellipsometric errors
1986
NBS SP 400-78
10.6028/NBS.SP.400-78
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1986
NBS SP 400-78
10.6028/NBS.SP.400-78
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Results of the Monte Carlo calculation of one- and two-dimensional distributions of
particles and damage
1987
NBS SP 400-79
10.6028/NBS.SP.400-79
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1987
NBS SP 400-79
10.6028/NBS.SP.400-79
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Semiconductor measurement technology
1975
NBS SP 400-8
10.6028/NBS.SP.400-8
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1975
NBS SP 400-8
10.6028/NBS.SP.400-8
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Thin film reference materials development
1998
NIST SP 400-100
10.6028/NIST.SP.400-100
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1998
NIST SP 400-100
10.6028/NIST.SP.400-100
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Workshop on mass flow measurement and control for the semiconductor industry
2001
NIST SP 400-101
10.6028/NIST.SP.400-101
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2001
NIST SP 400-101
10.6028/NIST.SP.400-101
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Automatic determination of the interstitial oxygen content of silicon wafers polished
on both sides
1988
NIST SP 400-81
10.6028/NIST.SP.400-81
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1988
NIST SP 400-81
10.6028/NIST.SP.400-81
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Database for and statistical analysisof the interlaboratory determination of the conversion
coefficient for the measurement of the interstitial oxygen content of silicon by infrared
absorption
1989
NIST SP 400-82
10.6028/NIST.SP.400-82
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1989
NIST SP 400-82
10.6028/NIST.SP.400-82
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A software program for aiding the analysis of ellipsometric measurements, simple methods
1989
NIST SP 400-83
10.6028/NIST.SP.400-83
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1989
NIST SP 400-83
10.6028/NIST.SP.400-83
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A software program for aiding the analysis of ellipsometric measurements, simple spectroscopic
models
1990
NIST SP 400-84
10.6028/NIST.SP.400-84
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1990
NIST SP 400-84
10.6028/NIST.SP.400-84
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EPROP : an interactive FORTRAN program for computing selected electronic properties of gallium
arsenide and silicon
1990
NIST SP 400-85
10.6028/NIST.SP.400-85
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1990
NIST SP 400-85
10.6028/NIST.SP.400-85
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Thermal resistance measurements
1990
NIST SP 400-86
10.6028/NIST.SP.400-86
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1990
NIST SP 400-86
10.6028/NIST.SP.400-86
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A programmable reverse-bias safe operating area transistor testor
1990
NIST SP 400-87
10.6028/NIST.SP.400-87
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1990
NIST SP 400-87
10.6028/NIST.SP.400-87
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INSTANT - IGBT network simulation and transient Analysis tool
1992
NIST SP 400-88
10.6028/NIST.SP.400-88
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1992
NIST SP 400-88
10.6028/NIST.SP.400-88
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Version 2.0 of the TXYZ thermal analysis program
1992
NIST SP 400-89
10.6028/NIST.SP.400-89
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1992
NIST SP 400-89
10.6028/NIST.SP.400-89
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Evaluating a chip, wafer, or lot using SUXES, SPICE, and STAT2
1992
NIST SP 400-90
10.6028/NIST.SP.400-90
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1992
NIST SP 400-90
10.6028/NIST.SP.400-90
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A collection of computer programs for two-probe resistance (spreading resistance)
and four-probe resistance calculations, RESPAC
1993
NIST SP 400-91
10.6028/NIST.SP.400-91
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1993
NIST SP 400-91
10.6028/NIST.SP.400-91
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Evolution of silicon materials characterization
1993
NIST SP 400-92
10.6028/NIST.SP.400-92
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1993
NIST SP 400-92
10.6028/NIST.SP.400-92
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Design and testing guides for the CMOS and lateral bipolar-on-SOI test library
1994
NIST SP 400-93
10.6028/NIST.SP.400-93
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1994
NIST SP 400-93
10.6028/NIST.SP.400-93
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Improved characterization and evaluation measurements for HgCdTe detector materials,
processes, and devices used on the GOES and TIROS satelites
1994
NIST SP 400-94
10.6028/NIST.SP.400-94
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1994
NIST SP 400-94
10.6028/NIST.SP.400-94
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User's manual for the program MONSEL-1
1994
NIST SP 400-95
10.6028/NIST.SP.400-95
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1994
NIST SP 400-95
10.6028/NIST.SP.400-95
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Test structure implementation document
1995
NIST SP 400-97
10.6028/NIST.SP.400-97
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1995
NIST SP 400-97
10.6028/NIST.SP.400-97
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Survey of optical characterization methods for materials, processing, and manufacturing
in the semiconductor industry
1995
NIST SP 400-98
10.6028/NIST.SP.400-98
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1995
NIST SP 400-98
10.6028/NIST.SP.400-98
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Semiconductor measurement technology : the results of an interlaboratory study of ellipsometric measurements of thin film
silicon dioxide on silicon
1997
NIST SP 400-99
10.6028/NIST.SP.400-99
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1997
NIST SP 400-99
10.6028/NIST.SP.400-99
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