TY  - RPRT
TI  - Analytic analysis of ellipsometric errors 
AU  - Chandler-Horowitz, Deane
PY  - 1986
PB  - National Bureau of Standards
CY  - Gaithersburg, MD
SN  - NBS SP 400-78
DO  - 10.6028/NBS.SP.400-78
ER  -