TY  - RPRT
TI  - Automatic determination of the interstitial oxygen content of silicon wafers polished on both sides 
AU  - Gladden, Warren K
AU  - Slaughter, Stephen R
AU  - Duncan, Walter M
AU  - Baghdadi, Aslan
PY  - 1988
PB  - National Bureau of Standards
CY  - Gaithersburg, MD
SN  - NIST SP 400-81
DO  - 10.6028/NIST.SP.400-81
ER  -