TY  - RPRT
TI  - Silicon-on-insulator 
AU  - Baghdadi, A
AU  - Walters, E J
PY  - 1987
PB  - National Bureau of Standards
CY  - Gaithersburg, MD
SN  - NBS SP 400-80
DO  - 10.6028/NBS.SP.400-80
ER  -