TY  - RPRT
TI  - A laser scanner for semiconductor devices 
AU  - Sawyer, David E
AU  - Berning, David W
PY  - 1977
PB  - National Bureau of Standards
CY  - Gaithersburg, MD
SN  - NBS SP 400-24
DO  - 10.6028/NBS.SP.400-24
ER  -