TY  - RPRT
TI  - A production-compatible microelectronic test pattern for evaluating photomask misalignment 
AU  - Russell, T J
AU  - Maxwell, D A
PY  - 1979
PB  - National Bureau of Standards
CY  - Gaithersburg, MD
SN  - NBS SP 400-51
DO  - 10.6028/NBS.SP.400-51
ER  -