TY  - RPRT
TI  - A software program for aiding the analysis of ellipsometric measurements, simple methods 
AU  - Marchiando, J F
PY  - 1989
PB  - National Institute of Standards and Technology
CY  - Gaithersburg, MD
SN  - NIST SP 400-83
DO  - 10.6028/NIST.SP.400-83
ER  -