TY  - RPRT
TI  - A FORTRAN program for analysis of data from microelectronic test structures 
AU  - Mattis, Richard L
AU  - Buehler, Martin G
PY  - 1983
PB  - National Bureau of Standards
CY  - Gaithersburg, MD
SN  - NBS SP 400-75
DO  - 10.6028/NBS.SP.400-75
ER  -