TY  - RPRT
TI  - Optical and dimensional-measurement problems with photomasking in microelectronics 
AU  - Jerke, John M
PY  - 1975
PB  - National Bureau of Standards
CY  - Gaithersburg, MD
SN  - NBS SP 400-20
DO  - 10.6028/NBS.SP.400-20
ER  -