TY  - RPRT
TI  - Angular sensitivity of controlled implanteddoping profiles 
AU  - Wilson, Robert G
AU  - Dunlap, Howard L
AU  - Jamba, Douglas M
AU  - Myers, David R
PY  - 1978
PB  - National Bureau of Standards
CY  - Gaithersburg, MD
SN  - NBS SP 400-49
DO  - 10.6028/NBS.SP.400-49
ER  -