TY  - RPRT
TI  - Differential capacitance-voltage profiling of Schottky barrier diodes for measuring implanted depth distributions in silicon 
AU  - Wilson, R G
AU  - Jamba, D M
PY  - 1982
PB  - National Bureau of Standards
CY  - Gaithersburg, MD
SN  - NBS SP 400-71
DO  - 10.6028/NBS.SP.400-71
ER  -