TY  - RPRT
TI  - A wafer chuck for use between -196 and 350 degrees C 
AU  - Koyama, R Y
AU  - Buehler, M G
PY  - 1979
PB  - National Bureau of Standards
CY  - Gaithersburg, MD
SN  - NBS SP 400-55
DO  - 10.6028/NBS.SP.400-55
ER  -