TY - RPRT TI - Interlaboratory study on linewidth measurements for antireflective chromium photomasks AU - Jerke, John M AU - Croarkin, M Carroll AU - Varner, Ruth N PY - 1982 PB - National Bureau of Standards CY - Gaithersburg, MD SN - NBS SP 400-74 DO - 10.6028/NBS.SP.400-74 ER -