TY  - RPRT
TI  - Semiconductor measurement technology 
AU  - Bullis, W Murray
AU  - Mayo-Wells, J Franklin
PY  - 1978
PB  - National Bureau of Standards
CY  - Gaithersburg, MD
SN  - NBS SP 400-36
DO  - 10.6028/NBS.SP.400-36
ER  -