TY  - RPRT
TI  - Automated scanning low-energy electron probe (ASLEEP) for semiconductor wafer diagnostics 
AU  - Christou, A
PY  - 1978
PB  - National Bureau of Standards
CY  - Gaithersburg, MD
SN  - NBS SP 400-30
DO  - 10.6028/NBS.SP.400-30
ER  -