TY  - RPRT
TI  - Accurate linewidth measurements on integrated-circuit photomasks 
AU  - Jerke, John M
PY  - 1980
PB  - National Bureau of Standards
CY  - Gaithersburg, MD
SN  - NBS SP 400-43
DO  - 10.6028/NBS.SP.400-43
ER  -