TY - RPRT TI - The relationship between resistivity and dopant density for phosphorus-and boron-doped silicon AU - Thurber, W R AU - Mattis, R L AU - and, Liu Y AU - Filliben, J J PY - 1981 PB - National Bureau of Standards CY - Gaithersburg, MD SN - NBS SP 400-64 DO - 10.6028/NBS.SP.400-64 ER -