TY  - RPRT
TI  - The design, testing, and analysis of a comprehensive test pattern for measuring CMOSSOS process performance and control 
AU  - Linholm, Loren W
PY  - 1981
PB  - National Bureau of Standards
CY  - Gaithersburg, MD
SN  - NBS SP 400-66
DO  - 10.6028/NBS.SP.400-66
ER  -