TY  - RPRT
TI  - Microelectronic test pattern NBS-3 for evaluating the resistivity-dopant density relationship of silicon 
AU  - Buehler, Martin G
PY  - 1976
PB  - National Bureau of Standards
CY  - Gaithersburg, MD
SN  - NBS SP 400-22
DO  - 10.6028/NBS.SP.400-22
ER  -