TY  - RPRT
TI  - Planar test structures for characterizing impurities in silicon 
AU  - Buchler, M G
AU  - David, J M
AU  - Mattis, R L
AU  - Phillips, W E
AU  - Thurber, W R
PY  - 1976
PB  - National Bureau of Standards
CY  - Gaithersburg, MD
SN  - NBS SP 400-21
DO  - 10.6028/NBS.SP.400-21
ER  -