TY  - RPRT
TI  - Workshop on mass flow measurement and control for the semiconductor industry 
AU  - Berg, Robert F
AU  - Green, David S
AU  - Mattingly, George E
PY  - 2001
PB  - National Institute of Standards and Technology
CY  - Gaithersburg, MD
SN  - NIST SP 400-101
DO  - 10.6028/NIST.SP.400-101
ER  -