TY  - RPRT
TI  - Notes on SEM examination of microelectronic devices 
AU  - Devaney, John R
PY  - 1977
PB  - National Bureau of Standards
CY  - Gaithersburg, MD
SN  - NBS SP 400-35
DO  - 10.6028/NBS.SP.400-35
ER  -