TY  - RPRT
TI  - Semiconductor measurement technology : the results of an interlaboratory study of ellipsometric measurements of thin film silicon dioxide on silicon
AU  - Belzer, Barbara J
AU  - Blackburn, David L
PY  - 1997
PB  - National Institute of Standards and Technology
CY  - Gaithersburg, MD
SN  - NIST SP 400-99
DO  - 10.6028/NIST.SP.400-99
ER  -