TY  - RPRT
TI  - Thin film reference materials development 
AU  - Belzer, Barbara J
AU  - Blackburn, David L
PY  - 1998
PB  - National Institute of Standards and Technology
CY  - Gaithersburg, MD
SN  - NIST SP 400-100
DO  - 10.6028/NIST.SP.400-100
ER  -