TY  - RPRT
TI  - Automated photomask inspection 
AU  - Novotny, Donald B
AU  - Ciarlo, Dino R
PY  - 1978
PB  - National Bureau of Standards
CY  - Gaithersburg, MD
SN  - NBS SP 400-46
DO  - 10.6028/NBS.SP.400-46
ER  -