TY - RPRT TI - Survey of optical characterization methods for materials, processing, and manufacturing in the semiconductor industry AU - Bullis, W Murray AU - Perkowitz, S AU - Seiler, D G PY - 1995 PB - National Institute of Standards and Technology CY - Gaithersburg, MD SN - NIST SP 400-98 DO - 10.6028/NIST.SP.400-98 ER -