conductors¶
Wiring 1¶
type = metal
layer = m5_wiring
material = Ti/Au
thickness = 0.103
sheet = 0.1
NW pad¶
type = metal
layer = m1_nwpad
material = Ti/Au
thickness = 0.033
sheet = 0.3
characterized = TL_02
LED pad¶
type = metal
layer = m4_ledpad
material = Ti/Au
thickness = 0.033
sheet = 0.3
NW resistor¶
type = metal
layer = m3_res
material = PdAu
thickness = 0.060
sheet = 25
Silicon Rib¶
type = semiconductor
layer = wg_deep
material = Si
thickness = 0.220
sheet = 0.0
- doped
name = P+
layer = dp_p+
species = B
concentration = 5e20
sheet = 0.0
- doped
name = N+
layer = dp_n+
species = P
concentration = 5e20
sheet = 0.0
- doped
name = P
layer = dp_p
species = B
concentration = 1e17
sheet = 0.0
- doped
name = N
layer = dp_n
species = P
concentration = 1e17
sheet = 0.0
- doped
name = E
layer = dp_e
species = V
concentration = 1e17
sheet = 0.0
Silicon Partial¶
type = semiconductor
layer = wg_shallow
material = Si
thickness = 0.070
sheet = 1e3
- doped
name = P+
layer = dp_p+
species = B
concentration = 5e20
sheet = 23
- doped
name = N+
layer = dp_n+
species = P
concentration = 5e20
sheet = 9
- doped
name = P
layer = dp_p
species = B
concentration = 1e17
sheet = 1e3
- doped
name = N
layer = dp_n
species = P
concentration = 1e17
sheet = 1e3
- doped
name = E
layer = dp_e
species = V
concentration = 1e17
sheet = 1e3