conductors

Wiring 1

  • type = metal

  • layer = m5_wiring

  • material = Ti/Au

  • thickness = 0.103

  • sheet = 0.1

NW pad

  • type = metal

  • layer = m1_nwpad

  • material = Ti/Au

  • thickness = 0.033

  • sheet = 0.3

  • characterized = TL_02

LED pad

  • type = metal

  • layer = m4_ledpad

  • material = Ti/Au

  • thickness = 0.033

  • sheet = 0.3

NW resistor

  • type = metal

  • layer = m3_res

  • material = PdAu

  • thickness = 0.060

  • sheet = 25

Silicon Rib

  • type = semiconductor

  • layer = wg_deep

  • material = Si

  • thickness = 0.220

  • sheet = 0.0

  • doped
    • name = P+

    • layer = dp_p+

    • species = B

    • concentration = 5e20

    • sheet = 0.0

  • doped
    • name = N+

    • layer = dp_n+

    • species = P

    • concentration = 5e20

    • sheet = 0.0

  • doped
    • name = P

    • layer = dp_p

    • species = B

    • concentration = 1e17

    • sheet = 0.0

  • doped
    • name = N

    • layer = dp_n

    • species = P

    • concentration = 1e17

    • sheet = 0.0

  • doped
    • name = E

    • layer = dp_e

    • species = V

    • concentration = 1e17

    • sheet = 0.0

Silicon Partial

  • type = semiconductor

  • layer = wg_shallow

  • material = Si

  • thickness = 0.070

  • sheet = 1e3

  • doped
    • name = P+

    • layer = dp_p+

    • species = B

    • concentration = 5e20

    • sheet = 23

  • doped
    • name = N+

    • layer = dp_n+

    • species = P

    • concentration = 5e20

    • sheet = 9

  • doped
    • name = P

    • layer = dp_p

    • species = B

    • concentration = 1e17

    • sheet = 1e3

  • doped
    • name = N

    • layer = dp_n

    • species = P

    • concentration = 1e17

    • sheet = 1e3

  • doped
    • name = E

    • layer = dp_e

    • species = V

    • concentration = 1e17

    • sheet = 1e3