TY  - RPRT
TI  - Capacitance cell measurement of the out-of-plane expansion of thin films 
AU  - Snyder, Chad R
AU  - Mopsik, Frederick I
PY  - 2001
PB  - National Institute of Standards and Technology
CY  - Gaithersburg, MD
SN  - NIST SP 960-7
DO  - 10.6028/NIST.SP.960-7
ER  -