TY  - RPRT
TI  - Standard Reference Materials(R) User's Guide for RM 8096 and 8097: The MEMS 5-in-1, 2013 Edition 
AU  - Cassard, Janet M.
AU  - Geist, Jon
AU  - Vorburger, Theodore V.
AU  - Read, David T.
AU  - Gaitan, Michael
AU  - Seiler, David G.
PY  - 2013
PB  - National Institute of Standards and Technology
SN  - NIST SP 260-177
DO  - 10.6028/NIST.SP.260-177
ER  -