TY - RPRT TI - Certification of Standard Reference Material® 5000: Calibrated Overlay Wafer Standard AU - Stocker, Michael T. AU - Silver, Richard M. AU - Attota, Ravikiran AU - Jun, Jay S. PY - 2007 PB - National Institute of Standards and Technology SN - NIST SP 260-165 DO - 10.6028/NIST.SP.260-165 ER -