TY  - RPRT
TI  - Standard Reference material : the certification of 100 mm diameter silicon resistivity SRMs 2541 through 2547 using dual-configuration four-point probe maesurements, 2006 edition
AU  - Ehrstein, James R
AU  - Croarkin, M Carroll
AU  - Liu, Hung Kung
PY  - 2006
PB  - National Institute of Standards and Technology
CY  - Gaithersburg, MD
SN  - NIST SP 260-131e2006
DO  - 10.6028/NIST.SP.260-131e2006
ER  -