TY - RPRT TI - Standard Reference Materials : The certification of 100 mm diameter silicon resistivity SRMs 2541 through 2547 using dual-configuration four-point probe measurements, 1999 edition/ AU - Croarkin, M C AU - Ehrstein, J R PY - 1999 PB - National Institute of Standards and Technology CY - Gaithersburg, MD SN - NIST SP 260-131e2 DO - 10.6028/NIST.SP.260-131e2 ER -