TY  - RPRT
TI  - Standard Reference Materials : Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems/
AU  - Potzick, James E
PY  - 1997
PB  - National Institute of Standards and Technology
CY  - Gaithersburg, MD
SN  - NIST SP 260-129
DO  - 10.6028/NIST.SP.260-129
ER  -