TY  - RPRT
TI  - Standard Reference Materials : Certification of a standard reference material for the determination of interstitial oxygen concentration in semiconductor silicon by infrared spectrophotometry/
AU  - Rennex, Brian G
PY  - 1994
PB  - National Institute of Standards and Technology
CY  - Gaithersburg, MD
SN  - NIST SP 260-121
DO  - 10.6028/NIST.SP.260-121
ER  -