TY  - RPRT
TI  - Standard Reference Materials : Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems/
AU  - Varner, Ruth N
AU  - Vezzetti, Carol F
PY  - 1992
PB  - National Institute of Standards and Technology
CY  - Gaithersburg, MD
SN  - NIST SP 260-119
DO  - 10.6028/NIST.SP.260-119
ER  -