TY  - RPRT
TI  - Dimensional measurement of nanostructures with scanning electron microscopy 
AU  - Bertness, K.A.
PY  - 2017
PB  - National Institute of Standards and Technology
CY  - Gaithersburg, MD
SN  - NIST SP 250-96
DO  - 10.6028/NIST.SP.250-96
ER  -