TY  - RPRT
TI  - Report from the Extreme Ultraviolet (EUV) Lithography Working Group Meeting : current state, needs, and path forward
AU  - Rasmussen, Elizabeth G
AU  - Wilthan, Boris
AU  - Simonds, Brian
PY  - 2023
PB  - National Institute of Standards and Technology
CY  - Gaithersburg, MD
SN  - NIST SP 1500-208
DO  - 10.6028/NIST.SP.1500-208
ER  -