TY  - RPRT
TI  - Incentives, infrastructure, and research and development needs to support a strong domestic semiconductor industry : summary of responses to request for information
AU  - Sellers, Diane
AU  - Paulsen, Kristin
AU  - Gundlach, David
AU  - Huergo, Jennifer
AU  - Molnar, Michael
AU  - Orji, Ndubuisi George
PY  - 2022
PB  - National Institute of Standards and Technology (U.S.)
CY  - Gaithersburg, MD
SN  - NIST SP 1282
DO  - 10.6028/NIST.SP.1282
ER  -