TY  - RPRT
TI  - Documentation for Reference Material (RM) 8820 : A Versatile, Multipurpose Dimensional Metrology Calibration Standard for Scanned Particle Beam, Scanned Probe and Optical Microscopy 
AU  - Postek, Michael T.
AU  - Vladar, Andras E.
AU  - Ming, Bin
AU  - Bunday, Benjamin
PY  - 2014
PB  - National Institute of Standards and Technology
SN  - NIST SP 1170
DO  - 10.6028/NIST.SP.1170
ER  -