TY  - RPRT
TI  - Surface finish metrology tutorial 
AU  - Vorburger, T V
AU  - Raja, J
PY  - 1990
PB  - National Institute of Standards and Technology
CY  - Gaithersburg, MD
SN  - NIST IR 89-4088
DO  - 10.6028/NIST.IR.89-4088
ER  -