TY  - RPRT
TI  - An approach to accurate x-ray mask measurements in a scanning electron microscope 
AU  - Postek, Michael T
AU  - Larrabee, Robert D
AU  - Keery, William J
PY  - 1989
PB  - National Institute of Standards and Technology
CY  - Gaithersburg, MD
SN  - NIST IR 89-4047
DO  - 10.6028/NIST.IR.89-4047
ER  -