TY - RPRT TI - Semiconductors and Microelectronics Standards: Report to the Interagency Committee on Standards Policy by the Semiconductor and Microelectronics Working Group AU - Kahn, Jason AU - Greer, Chris PY - 2023 PB - National Institute of Standards and Technology CY - Gaithersburg, MD SN - NIST IR 8501 DO - 10.6028/NIST.IR.8501 ER -