TY  - RPRT
TI  - Semiconductor Microelectronics and Nanoelectronics Programs 
AU  - Martinez de Pinillos, Joaquin V
AU  - Obeng, Yaw S
AU  - Buckley, Michele
PY  - 2009
PB  - National Institute of Standards and Technology
CY  - Gaithersburg, MD
SN  - NIST IR 7604
DO  - 10.6028/NIST.IR.7604
ER  -