TY  - RPRT
TI  - Semiconductor microelectronics and nanoelectronics programs 
AU  - Knight, Stephen
AU  - de Pinillos, Joaquin V Martinez
AU  - Obeng, Yaw S
AU  - Buckley, Michele
PY  - 2008
PB  - National Institute of Standards and Technology
CY  - Gaithersburg, MD
SN  - NIST IR 7513
DO  - 10.6028/NIST.IR.7513
ER  -