TY  - RPRT
TI  - Semiconductor microelectronics and nanoelectronics programs 
AU  - Knight, Stephen
AU  - Pinillos, Joaquin V Martinez de
AU  - Buckley, Michele
PY  - 2006
PB  - National Institute of Standards and Technology
CY  - Gaithersburg, MD
SN  - NIST IR 7321
DO  - 10.6028/NIST.IR.7321
ER  -