TY  - RPRT
TI  - MEMS length and strain round robin results with uncertainty analysis 
AU  - Marshall, Janet C
AU  - Scace, Robert I
AU  - Baylies, Winthrop A
PY  - 2006
PB  - National Institute of Standards and Technology
CY  - Gaithersburg, MD
SN  - NIST IR 7291
DO  - 10.6028/NIST.IR.7291
ER  -