TY  - RPRT
TI  - A framework for standard modular simulation : application to semiconductor wafer fabrication
AU  - Li, Heshan
AU  - Ramirez-Hernandez, Jose A
AU  - Fernandez, Emmanuel
AU  - McLean, Charles R
AU  - Leong, Swee
PY  - 2005
PB  - National Institute of Standards and Technology
CY  - Gaithersburg, MD
SN  - NIST IR 7236
DO  - 10.6028/NIST.IR.7236
ER  -