TY  - RPRT
TI  - Implementation of simulation program for modeling the effective resistivity of nanometer scale film and line interconnects 
AU  - Yarimbiyik, A Emre
AU  - Schafft, Harry A
AU  - Allen, Richard A
AU  - Zaghloul, Mona E Zaghloul
AU  - Blackburn, David L
PY  - 2006
PB  - National Institute of Standards and Technology
CY  - Gaithersburg, MD
SN  - NIST IR 7234
DO  - 10.6028/NIST.IR.7234
ER  -