TY  - RPRT
TI  - Semiconductor factory and equipment clock synchronization for e-manufacturing 
AU  - Li, Ya-Shian
AU  - Van Eck, Brad
PY  - 2004
PB  - National Institute of Standards and Technology
CY  - Gaithersburg, MD
SN  - NIST IR 7184
DO  - 10.6028/NIST.IR.7184
ER  -