TY  - RPRT
TI  - Materials Science and Engineering Laboratory : Nanometrology FY 20042005 projects
AU  - Allocca, Clare
AU  - Freiman, Stephen
PY  - 2005
PB  - National Institute of Standards and Technology
CY  - Gaithersburg, MD
SN  - NIST IR 7130
DO  - 10.6028/NIST.IR.7130
ER  -